Heterogeneous Photonic Integration by Direct Wafer Bonding

Author(s)
M. L. Davenport, L. Chang, D. Huang, N. Volet, and J. E. Bowers
Publication Date
Publication Type
Conference
Journal/Conference Name
Semiconductor Wafer Bonding Symposium
Indexing
Honolulu HI

Semiconductor Wafer Bonding Symposium, Electrochemical Society Meeting

Publication File
C1010.pdf370.59 KB