Electrothermal SCS micromirror with large-vertical-displacement actuation

Author(s)
A. Jain, H. Qu, S. T. Todd, G. K. Fedder, and H. Xie
Publication Date
Publication Type
Conference
Journal/Conference Name
Hilton Head 2004: Solid-State Sensor, Actuator and Microsyst
Indexing
pp. 228-231, Hilton Head Island, SC

Hilton Head 2004: Solid-State Sensor, Actuator and Microsystems Workshop

Publication File
todd04hh.pdf375.93 KB