Piezoelectric tuning of a suspended silicon nitride ring resonator

Author(s)
W. Jin, E. J. Stanton, N. Volet, R. G. Polcawich, D. Baney, P. Morton, and J. E. Bowers
Publication Image
piezoelectric-resonance-tuning
Publication Date
Publication Type
Conference
Journal/Conference Name
2017 IEEE Photonics Conference (IPC)
Indexing
pp. 117-118; Orlando, FL

A novel piezoelectric actuator is fabricated on a suspended silicon nitride ring resonator to tune the optical resonance via mechanical deformation. Fabricated devices exhibit tuning across a full free spectral range by applying 16 V across the piezoelectric.

Publication File
Research Areas
Silicon Photonics
Photonics Integrated Circuits