Nanoscale Foundries: Electronics, Photonics, Ionics, Fluidics
Nanoscale Foundries: Electronics, Photonics, Ionics, Fluidics
Dr. Rajeev Ram
Department of Electrical Engineering & Computer Science, MIT
Modern silicon fabs routinely produce functional electrical components for a few dollars at part counts exceeding
billions per year and a complexity rivaling the human genome. The productivity of these fabs is ensured by design
rules that govern the structures that constitute these systems. These design rules govern the range of sizes and