Publication Image
Publication Date
Publication Type
Conference
Journal/Conference Name
2017 IEEE Photonics Conference (IPC)
Indexing
pp. 117-118; Orlando, FL
A novel piezoelectric actuator is fabricated on a suspended silicon nitride ring resonator to tune the optical resonance via mechanical deformation. Fabricated devices exhibit tuning across a full free spectral range by applying 16 V across the piezoelectric.
Publication File
Research Areas
Silicon Photonics
Photonics Integrated Circuits